Intel Installs ASML TWINSCAN EXE:5200B High-NA EUV Machine for 14A Node
Intel Foundry announced that it has managed to install the world's most advanced EUV machine—ASML's TWINSCAN EXE:5200B High-NA EUV scanner—in its facilities. The company is producing its 14A node using High-NA EUV lithography, marking the first industry transition from Low-NA. In collaboration with ASML, Intel has completed acceptance testing at Intel Foundry for its 14A node to enhance wafer output. The TWINSCAN EXE:5200B is ASML's second version of High-NA EUV scanners, following the TWINSCAN EXE:5000, which Intel initially used for its 14A trial runs. Intel previously reported processing over 30,000 wafers in a single quarter, achieving simplified manufacturing by reducing the steps needed for a specific layer from 40 to fewer than 10, resulting in significantly faster cycle times.
The new TWINSCAN EXE:5200B achieves an output of 175 wafers per hour in standard conditions, where Intel plans to tune it to over 200 wafers per hour. The machine also advances overlay precision, enabling accurate alignment of distinct lithography layers down to 0.7 nanometers. This achievement builds on Intel's High NA EUV experience, which began in 2023 with the installation of the industry's first commercial High NA tool at its Oregon research and development facility. Intel is currently shipping 14A PDK 0.5 to customers, who are reportedly very satisfied with the node's development. The company itself has praised the 14A node development as it has been achieving far better yield and performance parameters at this stage of development than the 18A node.
The new TWINSCAN EXE:5200B achieves an output of 175 wafers per hour in standard conditions, where Intel plans to tune it to over 200 wafers per hour. The machine also advances overlay precision, enabling accurate alignment of distinct lithography layers down to 0.7 nanometers. This achievement builds on Intel's High NA EUV experience, which began in 2023 with the installation of the industry's first commercial High NA tool at its Oregon research and development facility. Intel is currently shipping 14A PDK 0.5 to customers, who are reportedly very satisfied with the node's development. The company itself has praised the 14A node development as it has been achieving far better yield and performance parameters at this stage of development than the 18A node.

























































































































































































































































































































































































































































































































































































































